Interaction of Ti with fused silica and sapphire during metallization
- Y.S. Chaug
- N.J. Chou
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Publications
358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Metal induced crystallization of amorphous silicon
- P.A. Psaras
- L. Hultman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Inverse photoemission study of the Si(100)-(2x 1) K surface
- Inder P. Batra
- J.M. Nicholls
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Transmission electron microscopy studies of the microstructure of AuNiGe ohmic contact to n-type GaAs
- Yih-Cheng Shih
- E.L. Wilkie
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Chernisorption of silanes on the Si(111)-(7x7) surface
- S. Gates
- B.A. Scott
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary abstract: The low-temperature reactivity of Si(100) with NH3 and NO: Rate determining steps and rate enhancement via electronic excitations
- F. Bozso
- Ph. Avouris
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Radio frequency sputter deposition of si02 films at high rate
- J.S. Logar
- F. Jones
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Charge transport in magnetrons
- S.M. Rossnagel
- H.R. Kaufman
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dynamics of gas-surface energy transfer: Inelastic scattering of NO from Ag(111)
- C.T. Rettner
- J. Kimman
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Pressure and plasma effects on the properties of magnetron sputtered carbon films
- S.M. Rossnagel
- Michael A. Russak
- et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films